| Parameters | Description | Values |
|
| Length of the device | 40 mm |
|
| Width of the device | 30 mm |
|
| Length of primary beam k1 | 40 mm |
|
| Length of secondary beam k2 | 30 mm |
|
| Width of primary beam k1 | 30 mm |
|
| Width of secondary beam k2 | 2 mm |
|
| Thickness of primary beam k1 | 60 µm |
|
| Thickness of secondary beam k2 | 16 µm |
|
| Length of proof mass m1 | 3 mm |
|
| Length of proof mass m2 | 0.5 mm |
|
| Thickness of m1 | 500 µm |
|
| Thickness of m1 | 500 µm |
